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Sintered body, sputtering target, oxide thin film, thin film transistor and method for producing sintered body

소결체, 스퍼터링 타겟, 산화물 박막, 박막 트랜지스터 및 소결체의 제조방법

Sintered body, sputtering target, oxide thin film, thin film transistor and method for producing sintered body Representative drawing
Representative drawing
Category
Patent (Korea)
Application No. · Date
10-2024-0176793 · 2024.12.02
Registration No. · Date
10-2869632 · 2025.10.01
IPC
C04B-035/453
Claims
11
Status
Registered
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