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Apparatus and method for inspecting substrate defects

기판 결함검사장치 및 기판 결함검사방법

Apparatus and method for inspecting substrate defects Representative drawing
Representative drawing
Category
Patent (Korea)
Application No. · Date
10-2022-0113972 · 2022.09.08
Registration No. · Date
10-2905182 · 2025.12.23
IPC
G01N-021/88
Claims
10
Status
Registered
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