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Diagnostic system for diagnosing semiconductor processing equipment and control method thereof

반도체 가공 장치를 진단하는 진단 시스템 및 그것의 제어 방법

Diagnostic system for diagnosing semiconductor processing equipment and control method thereof Representative drawing
Representative drawing
Category
Patent (Korea)
Application No. · Date
10-2020-0174162 · 2020.12.14
Registration No. · Date
10-2268290 · 2021.06.17
IPC
H01L-021/67
Claims
9
Status
Registered
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