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Diagnostic system for diagnosing semiconductor processing equipment and control method thereof

반도체 가공 장치를 진단하는 진단 시스템 및 그것의 제어 방법

Diagnostic system for diagnosing semiconductor processing equipment and control method thereof Representative drawing
Representative drawing
Category
Patent (Korea)
Application No. · Date
10-2021-0078447 · 2021.06.17
Registration No. · Date
10-2373933 · 2022.03.08
IPC
H01L-021/67
Claims
9
Status
Registered
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